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A²ECF - Agileo Automation Controller Framework for standalone and cluster semiconductor equipment

Accueil > Nos produits > Semiconducteur > A²ECF

A²ECF is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management.


Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:
  • Multiuser management with access rights (operator, process engineer, field service engineer for example)
  • Automatic trace generation with tools to analyze equipment activity
  • Operator actions recording
  • EFEM devices management such as (contact us for list of supported devices):
    • Wafer handlers with one or dual arms
    • Pre-aligners
    • Load Ports and FOUP Openers
    • Scribe readers
  • Schedulers for wafer flow sequencing
  • Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through the integration of CIM300 from Cimetrix)

Download datasheet

 
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